Scuola di Microscopia per il laboratorio di Beni Culturali
A guest event of NanoInnovation 2023

Workshop on Imaging and Nano fabrication in Research for Electronics related Components

September 18th, 2023 | Sapienza Università di Roma

Co-organizers: ZEISS Microscopy, RAITH, Sapienza Università di Roma
Starting soon
Ongoing Stay Tuned for next time
Ended Stay Tuned for next time
  • 00 anni
  • 00 mesi
  • 00 giorni
  • 00 ore
  • 00 minuti
  • 00 secondi

Abstract and Program

Innovative research using nanofabrication plays crucial role in advancing manufacturing of new components for microelectronics and in development of novel devices based on nanostructures, nanophotonics or complex semiconductor integrated systems. Importantly, high-quality high-resolution imaging gives insights in the development process at each of the many steps to guide the researchers towards achieving their final goals. The aim of the workshop is to highlight progress in research and technology related to microelectronics and novel structures where imaging and nanofabrication are indispensable methods steering the applications of variety of novel advanced devices.

Topics:

  • FE-SEM imaging and related techniques for electronics
  • FIB-SEM workflows for electronics
  • e-beam and i-beam nanolithography
  • Microelectronics
  • Integrated nanophotonics
  • Single electronics
  • Quantum information science
  • Semiconductor Nanostructures for novel devices in electronics
  • Inspection and failure analysis in electronics
  • Nanoprobing
  • Semiconductor lasers, optical interconnects

  

Agenda

Monday, September 18th 2023

Topic
Speaker

10:45   

Registration

11:00

Welcome

Antonio d'Alessandro, Director of CNIS, Sapienza University of Rome
Giulio Lamedica, ZEISS
Vittorio Morandi, Coordinator of the PNRR-RI project iENTRANCE@ENL, CNR

11:30

Crossbeam-laser and Gemini imaging for semiconductor materials

Kirill Atlasov, ZEISS Microscopy

12:00

Lithography and characterization of nanostructures by scanning electron microscopy based techniques

Pasqualantonio Pingue, NEST. Pisa

12:30

The Prober Shuttle - a dedicated platform for performing nanoprobing tasks at low beam voltages addressing recent, current, and future technology nodes

Andrew Smith, Kleindiek

13:00

Lunch

14:00

Applications of advanced nanofabrication utilizing electron, ion and laser beams

Frank Nouvertne, Raith GmbH

14:30

Raith tools for nanofabrication

Andreas Remscheid, Raith GmbH

14:45

Multispecies FIB patterning: from nanometric prototypes to single defects in solids

Damiano Giubertoni, FBK, Trento

15:15

Coffee Break

15:45

Electron beam lithography: A versatile tool for research and industrial applications

Annamaria Gerardino, CNR-IFN, Rome

16:15

Design and nanofabrication techniques for micro-lenses

Filippo Romanato, University of Padua, Padua

16:45

Investigating the local properties of optoelectronic devices using Electron Microscopy and related techniques

Giorgio Divitini, IIT, Genoa

17:15

Open discussion and closing remarks

18:00

Get together (fingerfood and drinks)

Workshop in Collaboration with

Location details

Sapienza Università di Roma, Via Eudossiana 18, Cloister Room

Sapienza Università di Roma Via Eudossiana 18 00184 Rome Italy

Please fill out the form to register your participation

Caricamento del modulo in corso...

If you want to have more information on data processing at ZEISS please refer to our data privacy notice.