Scuola di Microscopia per il laboratorio di Beni Culturali

A guest event of NanoInnovation 2023

Workshop on Imaging and Nano fabrication in Research for Electronics related Components

September 18th, 2023 | Sapienza Università di Roma

18 settembre 2023

Co-organizers: ZEISS Microscopy, RAITH, Sapienza Università di Roma

Starting soon

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Abstract and Program

Innovative research using nanofabrication plays crucial role in advancing manufacturing of new components for microelectronics and in development of novel devices based on nanostructures, nanophotonics or complex semiconductor integrated systems. Importantly, high-quality high-resolution imaging gives insights in the development process at each of the many steps to guide the researchers towards achieving their final goals. The aim of the workshop is to highlight progress in research and technology related to microelectronics and novel structures where imaging and nanofabrication are indispensable methods steering the applications of variety of novel advanced devices.

Topics:

FE-SEM imaging and related techniques for electronics
FIB-SEM workflows for electronics
e-beam and i-beam nanolithography
Microelectronics
Integrated nanophotonics
Single electronics
Quantum information science
Semiconductor Nanostructures for novel devices in electronics
Inspection and failure analysis in electronics
Nanoprobing
Semiconductor lasers, optical interconnects

Agenda

Monday, September 18th 2023

	Topic	Speaker
10:45	Registration
11:00	Welcome	Antonio d'Alessandro, Director of CNIS, Sapienza University of Rome Giulio Lamedica, ZEISS Vittorio Morandi, Coordinator of the PNRR-RI project iENTRANCE@ENL, CNR
11:30	Crossbeam-laser and Gemini imaging for semiconductor materials	Kirill Atlasov, ZEISS Microscopy
12:00	Lithography and characterization of nanostructures by scanning electron microscopy based techniques	Pasqualantonio Pingue, NEST. Pisa
12:30	The Prober Shuttle - a dedicated platform for performing nanoprobing tasks at low beam voltages addressing recent, current, and future technology nodes	Andrew Smith, Kleindiek
13:00	Lunch
14:00	Applications of advanced nanofabrication utilizing electron, ion and laser beams	Frank Nouvertne, Raith GmbH
14:30	Raith tools for nanofabrication	Andreas Remscheid, Raith GmbH
14:45	Multispecies FIB patterning: from nanometric prototypes to single defects in solids	Damiano Giubertoni, FBK, Trento
15:15	Coffee Break
15:45	Electron beam lithography: A versatile tool for research and industrial applications	Annamaria Gerardino, CNR-IFN, Rome
16:15	Design and nanofabrication techniques for micro-lenses	Filippo Romanato, University of Padua, Padua
16:45	Investigating the local properties of optoelectronic devices using Electron Microscopy and related techniques	Giorgio Divitini, IIT, Genoa
17:15	Open discussion and closing remarks
18:00	Get together (fingerfood and drinks)