Workshop on Imaging and Nano fabrication in Research for Electronics related Components
September 18th, 2023 | Sapienza Università di Roma
- 00 anni
- 00 mesi
- 00 giorni
- 00 ore
- 00 minuti
- 00 secondi
Abstract and Program
Innovative research using nanofabrication plays crucial role in advancing manufacturing of new components for microelectronics and in development of novel devices based on nanostructures, nanophotonics or complex semiconductor integrated systems. Importantly, high-quality high-resolution imaging gives insights in the development process at each of the many steps to guide the researchers towards achieving their final goals. The aim of the workshop is to highlight progress in research and technology related to microelectronics and novel structures where imaging and nanofabrication are indispensable methods steering the applications of variety of novel advanced devices.
Topics:
- FE-SEM imaging and related techniques for electronics
- FIB-SEM workflows for electronics
- e-beam and i-beam nanolithography
- Microelectronics
- Integrated nanophotonics
- Single electronics
- Quantum information science
- Semiconductor Nanostructures for novel devices in electronics
- Inspection and failure analysis in electronics
- Nanoprobing
- Semiconductor lasers, optical interconnects
Agenda
Monday, September 18th 2023
Topic
|
Speaker
|
|
---|---|---|
10:45 |
Registration |
|
11:00 |
Welcome |
Antonio d'Alessandro, Director of CNIS, Sapienza University of Rome |
11:30 |
Crossbeam-laser and Gemini imaging for semiconductor materials |
Kirill Atlasov, ZEISS Microscopy |
12:00 |
Lithography and characterization of nanostructures by scanning electron microscopy based techniques |
Pasqualantonio Pingue, NEST. Pisa |
12:30 |
The Prober Shuttle - a dedicated platform for performing nanoprobing tasks at low beam voltages addressing recent, current, and future technology nodes |
Andrew Smith, Kleindiek |
13:00 |
Lunch |
|
14:00 |
Applications of advanced nanofabrication utilizing electron, ion and laser beams |
Frank Nouvertne, Raith GmbH |
14:30 |
Raith tools for nanofabrication |
Andreas Remscheid, Raith GmbH |
14:45 |
Multispecies FIB patterning: from nanometric prototypes to single defects in solids |
Damiano Giubertoni, FBK, Trento |
15:15 |
Coffee Break |
|
15:45 |
Electron beam lithography: A versatile tool for research and industrial applications |
Annamaria Gerardino, CNR-IFN, Rome |
16:15 |
Design and nanofabrication techniques for micro-lenses |
Filippo Romanato, University of Padua, Padua |
16:45 |
Investigating the local properties of optoelectronic devices using Electron Microscopy and related techniques |
Giorgio Divitini, IIT, Genoa |
17:15 |
Open discussion and closing remarks |
|
18:00 |
Get together (fingerfood and drinks) |
|